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Characteristics Of SnSbSe (SSS) Thin Films Grown by Atomic Layer Deposition for High Performance Phase Change Random Access Memory (PCRAM)
by
Lee, Keun
,
Kang, Sehun
,
Ku, Jachun
,
Hong, Kwon
,
Park, Sungki
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ECS transactions
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New Method for Identifying Yield Impacting Polishing Induced Defects (PID) on Polished Silicon Substrates
by
Kim, KeunSu
,
Moon, Byeongsam
,
Suh, Hyo Sik
,
Kim, Jiae
,
Venkat, Sivakumar
,
Lee, Sanghyun
,
Shen, William
,
Shin, Yong
,
Park, Jonggeun
,
An, Jeonghoon
,
Seo, Scott
,
Ku, Jachun
,
Park, SungKi
,
Saito, Jason
,
Douglas, Carlotte
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Conference Proceeding
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Improvement of Contact Resistance with Molecular Ion Implantation
by
Lee, Kyung Won
,
Lee, Jin Ku
,
Oh, Jae Geun
,
Huh, Tae Hoon
,
Ju, Min Ae
,
Jeon, Seung Joon
,
Ku, Ja Chun
,
Park, Sung Ki
,
Kim, Steve
,
Yoon, Dae Ho
,
Ra, Geum Joo
,
Harris, Mark A
,
Reece, Ronald N
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Novel shallow trench isolation process using flowable oxide CVD for sub-100 nm DRAM
by
Sung-Woong Chung
,
Sang-Tae Ahn
,
Hyun-Chul Sohn
,
Jachun Ku
,
Sungki Park
,
Yong-Wook Song
,
Hyo-Sik Park
,
Sang-Don Lee
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Novel shallow trench isolation process using flowable oxide CVD for sub-100nm DRAM
by
CHUNG, Sung-Woong
,
AHN, Sang-Tae
,
SOHN, Hyun-Chul
,
KU, Jachun
,
PARK, Sungki
,
SONG, Yong-Wook
,
PARK, Hyo-Sik
,
LEE, Sang-Don
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