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Search Results - Kuchiji, Hiroyuki
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Piezoelectric MEMS wideband acoustic sensor coated by organic film
by
Kuchiji, Hiroyuki
,
Masumoto, Naoki
,
Baba, Akiyoshi
Published in
Japanese Journal of Applied Physics
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Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film
by
Kuchiji, Hiroyuki
,
Masumoto, Naoki
,
Morishita, Kota
,
Hasegawa, Shunta
,
Suzuki, Takaaki
,
Baba, Akiyoshi
Published in
Japanese Journal of Applied Physics
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Japanese Journal Of Applied Physics
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Subjects
Broadband
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Organic Film
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Physical Sciences
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Physics
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Physics, Applied
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Piezoelectricity
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Polyurethane Resins
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Science & Technology
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Acoustic Response
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Acoustic Sensor
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Aln
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Film Thickness
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Materials Selection
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Mems
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Microelectromechanical Systems
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Microphone
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Optimization
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Piezoelectric
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Piezoelectric Mems
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Resonance
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Iopscience Journals
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