Search Results - Kukli Kaupo

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  1. 221
    Behavior of zirconium oxide films processed from novel monocyclopentadienyl precursors by atomic layer deposition

    Behavior of zirconium oxide films processed from novel monocyclopentadienyl precursors by atomic layer deposition by Kukli, Kaupo, Niinistö, Jaakko, Tamm, Aile, Ritala, Mikko, Leskelä, Markku

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  2. 222
    Atomic Layer Deposition of High-Permittivity Yttrium-Doped HfO[sub 2] Films

    Atomic Layer Deposition of High-Permittivity Yttrium-Doped HfO[sub 2] Films by Niinistö, Jaakko, Kukli, Kaupo, Sajavaara, Timo, Ritala, Mikko, Leskelä, Markku, Oberbeck, Lars, Sundqvist, Jonas, Schröder, Uwe

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  3. 223
    Controlled Growth of TaN, Ta3N5, and TaO x N y Thin Films by Atomic Layer Deposition

    Controlled Growth of TaN, Ta3N5, and TaO x N y Thin Films by Atomic Layer Deposition by Ritala, Mikko, Kalsi, Pia, Riihelä, Diana, Kukli, Kaupo, Leskelä, Markku, Jokinen, Janne

    Published in Chemistry of materials
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