Search Results - Kumiko \scshapeKanai, Kumiko \scshapeKanai

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    Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas

    Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas by Masayuki Wakatsuchi, Masayuki Wakatsuchi, Yoshiro Takaba, Yoshiro Takaba, Kumiko \scshapeKanai, Kumiko \scshapeKanai, Yoshio Ueda, Yoshio Ueda, Masahiro Nishikawa, Masahiro Nishikawa

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