Plasma-Enhanced Co-Polymerization of Organo-siloxane and Hydrocarbon for Low-k/Cu Interconnects by Kawahara, Jun, Nakano, Akinori, Kunimi, Nobutaka, Kinoshita, Keizo, Hayashi, Yoshihiro, Ishikawa, Akira, Seino, Yutaka, Ogata, Tetsuro, Sonoda, Yuzuru, Yoshino, Takenobu, Goto, Takashi, Takada, Syozo, Miyoshi, Hidenori, Matsuo, Hisanori, Kikkawa, Takamaro

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Vapor phase reactions in polymerization plasma for divinylsiloxane-bis-benzocyclobutene film deposition by Kinoshita, Keizo, Nakano, Akinori, Kawahara, Jun, Kunimi, Nobutaka, Hayashi, Yoshihiro, Kiso, Osamu, Saito, Naoaki, Nakamura, Keiji, Kikkawa, Takamaro

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An Organic Low-k Film Deposited by Plasma-Enhanced Copolymerization by Kawahara, Jun, Kunimi, Nobutaka, Kinoshita, Keizo, Nakano, Akinori, Komatsu, Masashi, Seino, Yutaka, Kikkawa, Takamaro

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Effect of Bridging Groups of Precursors on Modulus Improvement in Plasma-Enhanced Copolymerized Low-k Films by Kawahara, Jun, Kunimi, Nobutaka, Nakano, Akinori, Kinoshita, Keizo, Hayashi, Yoshihiro, Komatsu, Masashi, Seino, Yutaka, Ichikawa, Rie, Takasu, Yuko, Kikkawa, Takamaro

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Effect of bridging groups of precursors on modulus improvement in plasma co-polymerized low-k films by Kunimi, N., Kawahara, J., Nakano, A., Kinoshita, K., Hayashi, Y., Komatsu, M., Seino, Y., Ichikawa, R., Takasu, Y., Kikkawa, T.

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Interaction of dynamin with microtubules: its structure and GTPase activity investigated by using highly purified dynamin by Maeda, K, Nakata, T, Noda, Y, Sato-Yoshitake, R, Hirokawa, N

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