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Performance Improvement for Ge FinFET CMOS Inverter With Supercritical Fluid Treatment
by
Ruan, Dun-Bao
,
Chang-Liao, Kuei-Shu
,
Liu, Chih-Wei
,
Lee, Yao-Jen
,
Chien, Yu-Hsuan
,
Kuo, Bo-Lien
,
Chiu, Yu-Chuan
,
Gan, Kai-Jhih
,
Hsu, Chih-Chieh
,
Liu, Po-Tsun
Published in
IEEE electron device letters
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Enhanced reliability and uniformity for Ge pMOSFET with low temperature supercritical fluid treatment
by
Ruan, Dun-Bao
,
Chang-Liao, Kuei-Shu
,
Li, Ji-Syuan
,
Kuo, Bo-Lien
,
Hong, Zi-Qin
,
Liu, Guan-Ting
,
Liu, Po-Tsun
Published in
Surface & coatings technology
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High Performance Ge FinFET CMOS Invertor with \mathrm}=2.0\ \text/\mu\mathrm at \mathrm}=1\mathrm, \mathrm.\mathrm.=64\ \text/\text,\mathrm}/\mathrm}=2.5\times 10^, and \text\ \tex...
by
Wu, Cheng-Yu
,
Ruan, Dun-Bao
,
Chang-Liao, Kuei-Shu
,
Lee, Yao-Jen
,
Chiu, Yu-Chuan
,
Liu, Chih-Wei
,
Liu, Guan-Ting
,
Kuo, Bo-Lien
,
Yang, Kai-Chun
,
Li, Cheng-Han
,
Liu, Po-Tsun
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Ieee Electron Device Letters
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Surface & Coatings Technology
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Oxidation
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Cmos
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Cmos Inverter
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Engineering, Electrical & Electronic
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Finfets
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Ge Finfet
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High Pressure
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Inverters
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Logic Gates
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