Search Results - Kurata, Yuuto

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    Advanced Atomic-scale Insights into the Chemical Mechanical Polishing Process with Ceria Abrasives using Molecular Dynamics and Neural Network Potential

    Advanced Atomic-scale Insights into the Chemical Mechanical Polishing Process with Ceria Abrasives using Molecular Dynamics and Neural Network Potential by Okuno, Yoshishige, Hirakawa, Teruo, Ota, Fukiko, Kurata, Yuuto, Orita, Akihiro, Nomura, Satoyuki

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