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Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition
by
Terekhov, Vladimir A.
,
Terukov, Evgeniy I.
,
Undalov, Yurii K.
,
Barkov, Konstantin A.
,
Kurilo, Nikolay A.
,
Ivkov, Sergey A.
,
Nesterov, Dmitry N.
,
Seredin, Pavel V.
,
Goloshchapov, Dmitry L.
,
Minakov, Dmitriy A.
,
Popova, Elena V.
,
Lukin, Anatoly N.
,
Trapeznikova, Irina N.
Published in
Symmetry (Basel)
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Investigations of Nanoscale Columnar AlxGa1-xN/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface
by
Seredin, Pavel Vladimirovich
,
Kurilo, Nikolay
,
Goloshchapov, Dmitry L.
,
Kashkarov, Vladimir
,
Lenshin, Aleksandr S.
,
Buylov, Nikita
,
Nesterov, Dmitry
,
Mizerov, Andrey
,
Kukushkin, Sergey A.
,
Timoshnev, S.
,
Shubina, K. Yu
,
Sobolev, M. S.
Published in
Photonics
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Investigations of Nanoscale Columnar Al[sub.x]Ga[sub.1-x]N/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface
by
Seredin, Pavel Vladimirovich
,
Kurilo, Nikolay
,
Goloshchapov, Dmitry L
,
Kashkarov, Vladimir
,
Lenshin, Aleksandr S
,
Buylov, Nikita
,
Nesterov, Dmitry
,
Mizerov, Andrey
,
Kukushkin, Sergey A
,
Timoshnev, S
,
Shubina, K. Yu
,
Sobolev, M. S
Published in
Photonics
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