Search Results - Kusaba, Kouta

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  1. 1
    A new emissive-probe method for electron temperature measurement in radio-frequency plasmas

    A new emissive-probe method for electron temperature measurement in radio-frequency plasmas by Kusaba, Kouta, Shindo, Haruo

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  2. 2
    New Emissive Probe Measurements of Electron Temperature in Two Modes of Radio-Frequency Plasmas

    New Emissive Probe Measurements of Electron Temperature in Two Modes of Radio-Frequency Plasmas by Kusaba, Kouta, Shindo, Haruo

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  3. 3
    Mode Transition Enhancement by Permittivity of Window Materials in Low Frequency Plasmas

    Mode Transition Enhancement by Permittivity of Window Materials in Low Frequency Plasmas by Jinbo, Yousuke, Kitamura, Yuichi, Kusaba, Kouta, Kikuchi, Masashi, Shindo, Haruo

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  4. 4
    A new emissive-probe method for electron temperature measurementin radio-frequency plasmas

    A new emissive-probe method for electron temperature measurementin radio-frequency plasmas by Kusaba, Kouta, Shindo, Haruo

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  5. 5
    Surface Wave Plasma Production Employing High-Permittivity Material for Microwave Window

    Surface Wave Plasma Production Employing High-Permittivity Material for Microwave Window by Kusaba, Kouta, Shinagawa, Keisuke, Furukawa, Masakazu, Kawamura, Katsufumi, Shindo, Haruo

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  6. 6
    Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency Bias

    Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency Bias by Fujii, Takashi, Aoyagi, Hitoshi, Kusaba, Kouta, Horiike, Yasuhiro, Shindo, Haruo

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  7. 7
    Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window

    Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window by Shinagawa, Keisuke, Shindo, Haruo, Kusaba, Kouta, Koromogawa, Takashi, Yamamoto, Jin, Furukawa, Masakazu

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  8. 8
    Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window

    Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window by Shinagawa, Keisuke, Yamamoto, Jin, Kusaba, Kouta, Shindo, Haruo, Furukawa, Masakazu

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  9. 9
    Optimum Frequency for Inductively Coupled Plasma Generation with a Single-Loop Antenna

    Optimum Frequency for Inductively Coupled Plasma Generation with a Single-Loop Antenna by Kusaba, Kouta, Kitamura, Yuichi, Shindo, Haruo

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