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Optimization of FINFET Single Diffusion Break Structure Profile
by
Kwan, ChunPui
,
Shen, HongLiang
,
Ashokmani, Sen
,
Gao, LeZhong
,
Dineen, Cassidy
,
Vijay Mane, Vishvajeet
,
Dayanga, Thilina
,
Sloan, Cameron
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Fin Reveal RIE Process Investigation
by
Kwan, ChunPui
,
Shen, Hongliang
,
Reis, Edward
,
Dineen, Cassidy
,
Nguyen, Tu Q.
,
Li, Lillian
,
Lifshitz, Yevgeny
,
Brown, Robert
,
Yang, Lan
,
He, Xiaoli
,
Chen, James
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Conference Proceeding
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Electronics Industry
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