Search Results - Kwang-Myeon Park

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  1. 1
    The effect of FSG stability at high temperature on stress-induced voiding in Cu dual-damascene interconnects

    The effect of FSG stability at high temperature on stress-induced voiding in Cu dual-damascene interconnects by OH, Hyeok-Sang, CHUNG, Juhyuk, LEE, Jung-Woo, KANG, Ki-Ho, PARK, Dea-Gun, HAH, Sangrok, CHO, In-Soo, PARK, Kwang-Myeon

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  2. 2
    Mechanisms of stress-induced voids in multi-level Cu interconnects

    Mechanisms of stress-induced voids in multi-level Cu interconnects by Byung-Lyul Park, Sang-Rok Hah, Chan-Geun Park, Dong-Kwon Jeong, Hong-Seong Son, Hyeok-Sang Oh, Ju-Hyuk Chung, Jeong-Lim Nam, Kwang-Myeon Park, Jae-Dong Byun

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