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    Improved electrical performance of ultra-thin BexMg1−xO films using super-cycle atomic layer deposition

    Improved electrical performance of ultra-thin BexMg1−xO films using super-cycle atomic layer deposition by Song, Haewon, Bowen, Wang, Shin, Jonghoon, Yu-Kyung, Park, Kim, Tae Kyun, Paik, Heewon, Seo, Haengha, Lim, Junil, Kwon, Daeson, Lee, Keonuk, Young Sin Kim, Shin, Dong Hoon, Hwang, Cheol Seong

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    Improved electrical performance of ultra-thin Be x Mg 1− x O films using super-cycle atomic layer deposition

    Improved electrical performance of ultra-thin Be x Mg 1− x O films using super-cycle atomic layer deposition by Song, Haewon, Wang, Bowen, Shin, Jonghoon, Park, Yu-Kyung, Kim, Tae Kyun, Paik, Heewon, Seo, Haengha, Lim, Junil, Kwon, Daeson, Lee, Keonuk, Kim, Young Sin, Shin, Dong Hoon, Hwang, Cheol Seong

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  3. 3
    Improved electrical performance of ultra-thin BeMgO films using super-cycle atomic layer deposition

    Improved electrical performance of ultra-thin BeMgO films using super-cycle atomic layer deposition by Song, Haewon, Wang, Bowen, Shin, Jonghoon, Park, Yu-Kyung, Kim, Tae Kyun, Paik, Heewon, Seo, Haengha, Lim, Junil, Kwon, Daeson, Lee, Keonuk, Kim, Young Sin, Shin, Dong Hoon, Hwang, Cheol Seong

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