Search Results - Kwon, Oh-Kyum

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  1. 1
    Atomic layer deposition of ruthenium thin films for copper glue layer

    Atomic layer deposition of ruthenium thin films for copper glue layer by KWON, Oh-Kyum, KIM, Jae-Hoon, PARK, Hyoung-Sang, KANG, Sang-Won

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  2. 2
    PEALD of a ruthenium adhesion layer for copper interconnects

    PEALD of a ruthenium adhesion layer for copper interconnects by KWON, Oh-Kyum, KWON, Se-Hun, PARK, Hyoung-Sang, KANG, Sang-Won

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  3. 3
    Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition

    Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition by Kwon, Se-Hun, Kwon, Oh-Kyum, Kim, Jin-Hyock, Oh, Heung-Ryong, Kim, Kwang-Ho, Kang, Sang-Won

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  4. 4
    Plasma-Enhanced Atomic Layer Deposition of Ru–TiN Thin Films for Copper Diffusion Barrier Metals

    Plasma-Enhanced Atomic Layer Deposition of Ru–TiN Thin Films for Copper Diffusion Barrier Metals by Kwon, Se-Hun, Kwon, Oh-Kyum, Min, Jae-Sik, Kang, Sang-Won

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  5. 5
    Bottom-up filling of submicrometer features in catalyst-enhanced chemical vapor deposition of copper

    Bottom-up filling of submicrometer features in catalyst-enhanced chemical vapor deposition of copper by SHIM, Kew-Chan, LEE, Hyun-Bae, KWON, Oh-Kyum, PARK, Hyung-Sang, KOH, Wonyong, KANG, Sang-Won

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  6. 6
    Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films

    Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films by Kwon, Oh-Kyum, Kwon, Se-Hun, Park, Hyoung-Sang, Kang, Sang-Won

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  7. 7
    Enhancement of the film growth rate by promoting iodine adsorption in the catalyst-enhanced chemical vapor deposition of Cu

    Enhancement of the film growth rate by promoting iodine adsorption in the catalyst-enhanced chemical vapor deposition of Cu by Kwon, Oh-Kyum, Lee, Hyun-Bae, Kang, Sang-Won, Park, Hyung-Sang

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  8. 8
    Improvement of the Morphological Stability by Stacking RuO[sub 2] on Ru Thin Films with Atomic Layer Deposition

    Improvement of the Morphological Stability by Stacking RuO[sub 2] on Ru Thin Films with Atomic Layer Deposition by Kwon, Se-Hun, Kwon, Oh-Kyum, Kim, Jae-Hoon, Jeong, Seong-Jun, Kim, Sung-Wook, Kang, Sang-Won

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  9. 9
    Enhancement of Iodine Adsorption Using I[sub 2] Plasma for Seedless Catalyst-Enhanced CVD of Copper

    Enhancement of Iodine Adsorption Using I[sub 2] Plasma for Seedless Catalyst-Enhanced CVD of Copper by Kwon, Oh-Kyum, Kim, Jae-Hoon, Park, Hyoung-Sang, Kang, Sang-Won

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