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Materials for bulk acoustic wave (BAW) resonators and filters
by
Löbl, H.P.
,
Klee, M.
,
Milsom, R.
,
Dekker, R.
,
Metzmacher, C.
,
Brand, W.
,
Lok, P.
Published in
Journal of the European Ceramic Society
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ITO films for antireflective and antistatic tube coatings prepared by d.c. magnetron sputtering
by
Löbl, H.P.
,
Huppertz, M.
,
Mergel, D.
Published in
Surface & coatings technology
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Thermal stability of nonstoichiometric silicon nitride films made by reactive dc magnetron sputter deposition
by
Löbl, H.P
,
Huppertz, M
Published in
Thin solid films
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Piezoelectric materials for BAW resonators and filters
by
Lobl, H.P.
,
Klee, M.
,
Metzmacher, C.
,
Brand, W.
,
Milsom, R.
,
Lok, P.
,
van Straten, F.
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High-voltage stability coatings in the Zeus panel
by
Balkenende, A.R.
,
Jaarsma, G.T.
,
Hoogsteen, W.
,
Löbl, H.P.
,
Scholten, M.
Published in
Philips journal of research
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Piezo-electric AlN and PZT films for micro-electronic applications
by
Lobl, H.P.
,
Klee, M.
,
Wunnicke, O.
,
Kiewitt, R.
,
Dekker, R.
,
Pelt, E.V.
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