Search Results - LABUN, Andrew H

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  1. 1
    Topography simulation for the virtual wafer fab

    Topography simulation for the virtual wafer fab by Cale, Timothy S., Merchant, Tushar P., Borucki, Leonard J., Labun, Andrew H.

    Published in Thin solid films
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  2. 2
    Etching of polysilicon in inductively coupled Cl2 and HBr discharges. I. Experimental characterization of polysilicon profiles

    Etching of polysilicon in inductively coupled Cl2 and HBr discharges. I. Experimental characterization of polysilicon profiles by Mahorowala, Arpan P., Sawin, Herbert H., Jones, Richard, Labun, Andrew H.

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  3. 3
    Mechanistic feature-scale profile simulation of SiO2 low-pressure chemical vapor deposition by tetraethoxysilane pyrolysis

    Mechanistic feature-scale profile simulation of SiO2 low-pressure chemical vapor deposition by tetraethoxysilane pyrolysis by Labun, Andrew H., Moffat, Harry K., Cale, Timothy S.

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  4. 4
    Topography simulation for the virtual wafer fab: Process and materials modeling in IC fabrication

    Topography simulation for the virtual wafer fab: Process and materials modeling in IC fabrication by CALE, Timothy S, MERCHANT, Tushar P, BORUCKI, Leonard J, LABUN, Andrew H

    Published in Thin solid films
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  5. 5
    Etching of polysilicon in inductively coupled Cl 2 and HBr discharges. I. Experimental characterization of polysilicon profiles

    Etching of polysilicon in inductively coupled Cl 2 and HBr discharges. I. Experimental characterization of polysilicon profiles by Mahorowala, Arpan P., Sawin, Herbert H., Jones, Richard, Labun, Andrew H.

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  6. 6
    Mechanistic feature-scale profile simulation of SiO 2 low-pressure chemical vapor deposition by tetraethoxysilane pyrolysis

    Mechanistic feature-scale profile simulation of SiO 2 low-pressure chemical vapor deposition by tetraethoxysilane pyrolysis by Labun, Andrew H., Moffat, Harry K., Cale, Timothy S.

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