Growth of (Ti, Zr)N films on Si by DC reactive sputtering of TiZr in N2/Ar gas mixtures effect of flow ratio by KUO, Yu-Lin, CHIAPYNG LEE, LAID, Chih-Huang, LIN, Jing-Cheng, PENG, Chao-Hsien, CHEN, Li-Chien, HSIEH, Ching-Hua, SHUE, Shau-Lin, LIANG, Mong-Song, DANIELS, Brian J, HUANG, Cheng-Lin

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