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In situ synthesis of Si3N4 in the Na2SiF6–N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition
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LEALCRUZ, A
,
PECHCANUL, M
Published in
Solid state ionics
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Solid State Ionics
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Cvd-Si
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Kinetics
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Silicon Precursor
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Sodium Silicofluoride
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