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Formation of Crystalline Si Optical Waveguides on Bulk (100) Si Substrate as a New Platform for On-Chip Interconnect Applications
by
Hung, Shih-Che
,
Lin, Shih-Jieh
,
Chao, Jiun-Jie
,
Chang, Chia-Yu
,
Lin, Meng-Jie
,
Lin, Ching-Fuh
Published in
Journal of lightwave technology
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Fabrication of Crystalline Si Waveguides on (1 0 0) Bulk Si Substrate Using Laser Reformation Method
by
HUNG, Shih-Che
,
LIN, Shih-Jieh
,
CHAO, Jiun-Jie
,
LIN, Ching-Fuh
Published in
Journal of lightwave technology
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Journal Of Lightwave Technology
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Electronics
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Engineering
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Engineering, Electrical & Electronic
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Excimer Lasers
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Optical Waveguides
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Oxidation
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Physical Sciences
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Science & Technology
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Silicon
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Substrates
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Telecommunications
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Waveguide Lasers
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Applied Sciences
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Broadband
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Circuit Properties
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Coupling
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Couplings
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Crystal Defects
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Ieee Xplore (Online Service)
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Optica Publishing Group Journals (Optical Society)
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