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XPS study of ion-beam-assisted formation of Si nanostructures in thin SiO2 layers
by
Kesler, V. G.
,
Yanovskaya, S. G.
,
Kachurin, G. A.
,
Leier, A. F.
,
Logvinsky, L. M.
Published in
Surface and interface analysis
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XPS study of ion‐beam‐assisted formation of Si nanostructures in thin SiO 2 layers
by
Kesler, V. G.
,
Yanovskaya, S. G.
,
Kachurin, G. A.
,
Leier, A. F.
,
Logvinsky, L. M.
Published in
Surface and interface analysis
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XPS study of ion-beam-assisted formation of Si nanostructures in thin SiO2 layers
by
KESLER, V. G
,
YANOVSKAYA, S. G
,
KACHURIN, G. A
,
LEIER, A. F
,
LOGVINSKY, L. M
Published in
Surface and interface analysis
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Surface And Interface Analysis
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Chemistry
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Chemistry, Physical
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Radiation-Induced Processes
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Radiation‐Induced Processes
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Science & Technology
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Si Nanostructures
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Xps
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Wiley-Blackwell Journals (Backfile Content)
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