Search Results - Lagudu, Uma Rames Krishna

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  1. 1
    Role of ionic strength in chemical mechanical polishing of silicon carbide using silica slurries

    Role of ionic strength in chemical mechanical polishing of silicon carbide using silica slurries by Lagudu, Uma Rames Krishna, Isono, Shintaro, Krishnan, Sitaraman, Babu, S.V.

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  2. 2
    Role of Potassium Permanganate-Based Solutions in Controlling the Galvanic Corrosion at Al-Co Interface

    Role of Potassium Permanganate-Based Solutions in Controlling the Galvanic Corrosion at Al-Co Interface by Krishna Lagudu, Uma Rames, Chockalingam, Ashwin M., Eckonomikos, Laertis, Babu, S. V.

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  3. 3
    Chemical Mechanical Polishing of Al-Co Films for Replacement Metal Gate Applications

    Chemical Mechanical Polishing of Al-Co Films for Replacement Metal Gate Applications by Lagudu, Uma Rames Krishna, Chockalingam, Ashwin M., Babu, S. V.

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    Single Particle Inductively Coupled Plasma Mass Spectrometry Study of Ceria Nanoparticle Size Distribution from Oxide CMP with Microreplicated Pads

    Single Particle Inductively Coupled Plasma Mass Spectrometry Study of Ceria Nanoparticle Size Distribution from Oxide CMP with Microreplicated Pads by Zazzera, Larry, Chan, Qilin, Stomberg, Jaimie, Simpson, Alexander, Loesch, Chris, LeHuu, Duy, Muradian, David, Lagudu, Uma Rames Krishna, Mader, Brian

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  5. 5
    Effect of Transition Metal Compounds on Amorphous SiC Removal Rates

    Effect of Transition Metal Compounds on Amorphous SiC Removal Rates by Lagudu, Uma Rames Krishna, Babu, S. V.

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  6. 6
    Development of Post-CMP Cleaners for Better Defect Performance

    Development of Post-CMP Cleaners for Better Defect Performance by Tran, Cuong, Zhang, Peng, Sun, Laisheng, Penta, Naresh K., Lagudu, Uma Rames K., Shipp, Devon, Babu, S.V

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