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Milliseconds Thermal Processing of Boron Hyperdoped Germanium
by
Cheng, Yu
,
Long, FangChao
,
Steuer, Oliver
,
Lambeva, Nikol
,
Bärwolf, Florian
,
Zscharschuch, Jens
,
Erbe, Artur
,
Helm, Manfred
,
Zhou, Shengqiang
,
Prucnal, Slawomir
Published in
Physica status solidi. A, Applications and materials science
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Physica Status Solidi. A, Applications And Materials Science
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Aktivierung
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Annealing
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B Hyperdoped Ge
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Bor
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Boron
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Diffusion
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Electrical Properties
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Elektrische Eigenschaft
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Flash Lamp Annealing
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Flash Lamps
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Flã¤Chenwiderstand
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Germanium
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Glã1⁄4Hen
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High Hole Concentration
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Ion Implantation
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Lã¶Cherdichte
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Lã¶Slichkeit
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Materials Science
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Materials Science, Multidisciplinary
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Millisekundenbereich
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