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A Planar 3 DOF Sample Manipulator for Nano-Scale Characterization
by
de Jong, B.R.
,
Brouwer, D.M.
,
Jansen, H.V.
,
M.J. de Boer
,
Lammertink, T.G.
,
Stramigioli, S.
,
Krijnen, G.J.M.
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Ieee Electronic Library (Iel) Conference Proceedings
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