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Efficient nanopatterning of Ge surface induced by oblique argon cluster ion beam
by
Korobeishchikov, N.G.
,
Nikolaev, I.V.
,
Lapega, A.V.
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Materials letters
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Materials Letters
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Gas Cluster Ion Beam
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Germanium
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Ion Sputtering
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Materials Science
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Materials Science, Multidisciplinary
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Surface Nanopatterning
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