Search Results - Latu-Romain, Eddy

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  1. 1
    Pulsed Transfer Etching of PS–PDMS Block Copolymers Self-Assembled in 193 nm Lithography Stacks

    Pulsed Transfer Etching of PS–PDMS Block Copolymers Self-Assembled in 193 nm Lithography Stacks by Girardot, Cécile, Böhme, Sophie, Archambault, Sophie, Salaün, Mathieu, Latu-Romain, Eddy, Cunge, Gilles, Joubert, Olivier, Zelsmann, Marc

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  2. 2
    Local strain measurements in shallow trench insulator structures using near-ultraviolet Raman spectroscopy: Simulation and experiment

    Local strain measurements in shallow trench insulator structures using near-ultraviolet Raman spectroscopy: Simulation and experiment by Latu-Romain, Eddy, Mermoux, Michel, Crisci, Alexandre, Delille, Dominique, Kwakman, Laurens F. Tz

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    Ultra-thin strained SOI substrate analysis by pseudo-MOS measurements

    Ultra-thin strained SOI substrate analysis by pseudo-MOS measurements by Gallon, C., Fenouillet-Beranger, C., Bresson, N., Cristoloveanu, Sorin, Allibert, Michel, Bord, S., Aulnette, C., Delille, Dominique, Latu-Romain, Eddy, Hartmann, Jean-Michel, Ernst, T., Andrieu, F., Campidelli, Y., Ghyselen, B., Cayrefourcq, I., Fournel, F., Kernevez, N., Skotnicki, T.

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