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Interpillar distance effect in a two-step microneedle DRIE process and its transfer to polymeric microneedles
by
Chávez-Urbiola, Iker Rodrigo
,
Ponce-Hernández, Juan
,
León-Muñoz, Gilberto
,
Cruz-Zabalegui, Alexis
,
Fernandez-Benavides, David
,
Alcantar-Peña, Jesús Javier
,
Martínez-Sanmiguel, Juan José
,
Díaz-Alonso, Daniela
,
Alvarado-Muñoz, Estephanny Jocelyn
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International journal of advanced manufacturing technology
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International Journal Of Advanced Manufacturing Technology
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Computer-Aided Engineering (Cad
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Reactive Ion Etching
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