Search Results - Le Solliec, J.M.

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    A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition

    A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition by Flicstein, J., Pata, S., Le Solliec, J.M., How Kee Chun, L.S., Palmier, J.F., Courant, J.L.

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