Search Results - Lee, Choong-Bong

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  1. 1
    Pattern roughness analysis using power spectral density: application and impact in photoresist formulation

    Pattern roughness analysis using power spectral density: application and impact in photoresist formulation by Cutler, Charlotte, Thackeray, James W, Trefonas, Peter, Millward, Dan, Lee, Choong-Bong, Mack, Chris

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  2. 2
    Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters

    Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters by Cutler, Charlotte, Lee, Choong-Bong, Thackeray, James W., Trefonas, Peter, Nelson, John, DeSisto, Jason, Li, Mingqi, Rena, Rochelle, Mack, Chris

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  3. 3
    Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process

    Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process by Cutler, Charlotte, Lee, Choong-Bong, Thackeray, James W., Mack, Chris, Nelson, John, DeSisto, Jason, Li, Mingqi, Aqad, Emad, Hou, Xisen, Marangoni, Tomas, Kaitz, Joshua, Rena, Rochelle

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  4. 4
    Understanding of Strategic Design of Resist Formulation Through Studying of Quencher-Functional Component and Those Contributions to High Resolution Patterning

    Understanding of Strategic Design of Resist Formulation Through Studying of Quencher-Functional Component and Those Contributions to High Resolution Patterning by Lee, Choong-Bong, Park, James, Cutler, Charlotte, DeSisto, Jason, Rena, Rochelle, Marangoni, Tomas, Aqad, Emad, Thackeray, James W.

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