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Layout-induced stress effects on the performance and variation of FinFETs
by
Lee, Choongmok
,
Kang, Hyun-Chul
,
Min, Jeong Guk
,
Kim, Jongchol
,
Kwon, Uihui
,
Lee, Keun-Ho
,
Park, Youngkwan
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Diffusion Tensor Imaging
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Engineering
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Finfet
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Performance Evaluation
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Semiconductor Process Modeling
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