Search Results - Lee, Heang-Seuk

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  1. 1
    Morphology and structural properties of nanocrystalline and nanocolumnar aluminum thin films grown on glass and Ti/glass substrates

    Morphology and structural properties of nanocrystalline and nanocolumnar aluminum thin films grown on glass and Ti/glass substrates by Sharma, S. K., Kim, Bo-Gyun, Lee, Heang-Seuk, Choi, Chi Kyu, Inamdar, A. I., Im, Hyunsik

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  2. 2
    Ultraviolet irradiation effect on the properties of leakage current and dielectric breakdown of low-dielectric-constant SiOC( H) films using comb capacitor structure

    Ultraviolet irradiation effect on the properties of leakage current and dielectric breakdown of low-dielectric-constant SiOC( H) films using comb capacitor structure by Kim, Chang Young, Navamathavan, R., Lee, Heang Seuk, Woo, Jong-Kwan, Hyun, Myung Taek, Lee, Kwang-Man, Jeung, Won Young, Choi, Chi Kyu

    Published in Thin solid films
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  3. 3
    Study of Cu diffusion behavior in low dielectric constant SiOC(–H) films deposited by plasma-enhanced chemical vapor deposition

    Study of Cu diffusion behavior in low dielectric constant SiOC(–H) films deposited by plasma-enhanced chemical vapor deposition by Choi, Chi Kyu, Lee, Heang Seuk, Navamathavan, R., Woo, Jong-Kwan, Kim, Chang Young

    Published in Thin solid films
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  4. 4
    Effect of evaporated copper and aluminum on post-annealed SiOC(–H) films deposited using plasma-enhanced chemical vapor deposition

    Effect of evaporated copper and aluminum on post-annealed SiOC(–H) films deposited using plasma-enhanced chemical vapor deposition by Kim, Chang Young, Lee, Heang Seuk, Navamathavan, R., Woo, Jong-Kwan, Choi, Chi Kyu

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  5. 5
    UV irradiation effects on the bonding structure and electrical properties of ultra low- k SiOC(–H) thin films for 45 nm technology node

    UV irradiation effects on the bonding structure and electrical properties of ultra low- k SiOC(–H) thin films for 45 nm technology node by Choi, Chi Kyu, Kim, Chang Young, Navamathavan, R., Lee, Heang Seuk, Woo, Jong-Kwan, Hyun, Myung Taek, Lee, Heon Ju, Jeung, Won Young

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