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Analysis and design of polysilicon thermal flexure actuator
by
Huang, Qing-An
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Lee, Neville Ka Shek
Published in
Journal of micromechanics and microengineering
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A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators
by
Huang, Qing-An
,
Lee, Neville Ka Shek
Published in
Sensors and actuators. A. Physical.
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Journal Of Micromechanics And Microengineering
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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