Search Results - Lee, Siimon

  • Showing 1 - 2 results of 2
Refine Results
  1. 1
    Residual Clamping Force and Dynamic Random Access Memory Data Retention Improved by Gate Tungsten Etch Dechucking Condition in a Bipolar Electrostatic Chuck

    Residual Clamping Force and Dynamic Random Access Memory Data Retention Improved by Gate Tungsten Etch Dechucking Condition in a Bipolar Electrostatic Chuck by Lee, Chung-Yuan, Lai, Chao-Sung, Yang, Chia-Ming, Wang, David HL, Lin, Betty, Lee, Siimon, Huang, Chi-Hung, Wei, Chen Chang

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    Residual Clamping Force and Dynamic Random Access Memory Data Retention Improved by Gate Tungsten Etch Dechucking Condition in a Bipolar Electrostatic Chuck

    Residual Clamping Force and Dynamic Random Access Memory Data Retention Improved by Gate Tungsten Etch Dechucking Condition in a Bipolar Electrostatic Chuck by Lee, Chung-Yuan, Lai, Chao-Sung, Yang, Chia-Ming, Wang, David HL, Lin, Betty, Lee, Siimon, Huang, Chi-Hung, Wei, Chen Chang

    Get full text
    Items that this one cites
    Article
    Save to List
    Saved in:

Search Tools: