Search Results - Lei, Shuen-Cheng Chris

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  1. 1
    The Benefits of High Landing Energy for E-Beam Inspection

    The Benefits of High Landing Energy for E-Beam Inspection by Patterson, Oliver D., Hafer, Richard F., Xiaohu Tang, Lei, Shuen-Cheng Chris

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  2. 2
    Detection of Sub-Design Rule Physical Defects Using E-Beam Inspection

    Detection of Sub-Design Rule Physical Defects Using E-Beam Inspection by Patterson, Oliver D., Lee, Julie, Salvador, Dave M., Lei, Shuen-Cheng Chris, Xiaohu Tang

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  3. 3
    The merits of high landing energy for E-beam inspection

    The merits of high landing energy for E-beam inspection by Patterson, Oliver D., Hafer, Richard, Xiaohu Tang, Lei, Shuen-Cheng Chris

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  4. 4
    E-Beam Hot Spot Inspection for Early Detection of Systematic Patterning Problems for a 22 nm SOI Technology

    E-Beam Hot Spot Inspection for Early Detection of Systematic Patterning Problems for a 22 nm SOI Technology by Patterson, Oliver D., Ryan, Deborah A., Monkowski, Michael D., Nguyen-Ngoc, Dominique, Morgenfeld, Bradley, Chung-Han Lee, Chieh-Hung Liu, Chi-Ming Chan, Shih-Tsung Chen, Lei, Shuen-Cheng Chris

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  5. 5
    In-line characterization of EDRAM for a FINFET technology using VC inspection

    In-line characterization of EDRAM for a FINFET technology using VC inspection by Patterson, Oliver D., Hafer, Richard, Mittal, Surbhi, Arya, Ankur, Stein, Kenneth, Ho, Herbert, Davies, William, Tang, Xiaohu, Hsieh, Brian Yueh-Ling, Lei, Shuen-Cheng Chris

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  6. 6
    E-beam inspection throughput acceleration via Targeted Critical Area Inspection

    E-beam inspection throughput acceleration via Targeted Critical Area Inspection by Patterson, Oliver D., Topaloglu, Rasit O., Hafer, Richard F., Lei, Shuen-Cheng Chris, Tang, Xiaohu

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