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Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets
by
Gojdka, Björn
,
Cichon, Daniel
,
Lembrecht, Yannik
,
Bodduluri, Mani Teja
,
Lisec, Thomas
,
Stahl-Offergeld, Markus
,
Hohe, Hans-Peter
,
Niekiel, Florian
Published in
Micromachines (Basel)
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Micromachines
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Chemistry
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Flow Regulators
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Hall Effect
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Integrated Position Detection
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Magnetic Fields
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Magnets
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Micro Positioning
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Micromagnets
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