Search Results - Levitskaja, S.K.

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    Selective etching of multilevel submicron structures in plasma-chemical reactor (PCR) with low ion energy

    Selective etching of multilevel submicron structures in plasma-chemical reactor (PCR) with low ion energy by Ustalov, V.V., Fedorovich, O.A., Levitskaja, S.K.

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    Plasma-chemical reactor with low ion energy for selective etching

    Plasma-chemical reactor with low ion energy for selective etching by Ustalov, V.V., Fedorovich, O.A., Vdovenkov, A.A., Levitskaja, S.K.

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