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Measurement of package-induced stress and thermal zero shift in transfer molded silicon piezoresistive pressure sensors
by
ther, J B Nysæ
,
Larsen, A
,
Liverød, B
,
Ohlckers, P
Published in
Journal of micromechanics and microengineering
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Structures for piezoresistive measurement of package induced stress in transfer molded silicon pressure sensors
by
Nysæther, J.B.
,
Larsen, A.
,
Liverød, B.
,
Ohlckers, P.
Published in
Microelectronics and reliability
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