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Surface morphology of nitrogen doped tetrahedral amorphous carbon films on silicon by atomic microscopy imaging
by
Chen, Z.Y.
,
Yu, Y.H.
,
Zhao, J.P.
,
Wang, X.
,
Yang, S.Q.
,
Shi, T.S.
,
Liu, X.H.
,
Lou, E.Z.
,
Xu, J.B.
,
Wilson, I.H.
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Materials letters
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Materials Letters
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Exact Sciences And Technology
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Filtered Arc Deposition
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Materials Science
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Materials Science, Multidisciplinary
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Physical Sciences
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Physics
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Physics, Applied
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Science & Technology
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Silicon Substrates
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Solid Surfaces And Solid-Solid Interfaces
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Surface Morphology
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Surface Structure And Topography
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Surfaces And Interfaces; Thin Films And Whiskers
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Technology
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Tetrahedral Amorphous Carbon
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Thin Films
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Sciencedirect (Online Service)
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Sciencedirect Freedom Collection 2022-2024
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Elsevier Sd Backfile Materials Science
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