Search Results - Lu, Tsuo-Wen

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  1. 1
    Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry

    Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry by Wen, Tsai-Yu, Lu, Tsuo-Wen, Wang, Yu-Ren, Lin, Chin-Fu, Wu, J Y, Chang, Shao-Ju, Chiu, Sheng-Min, Huang, Chien-Jen, Cheng, Chao-Yu, Cheng, Juli, Raphael, Getin, Jiang, Zhiming, Tan, Zhengquan

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    Novel chlorine-enriched SiO2/Si3N4 bilayers to downscale gate dielectrics toward sub-45nm and beyond

    Novel chlorine-enriched SiO2/Si3N4 bilayers to downscale gate dielectrics toward sub-45nm and beyond by Wang, F C C, Lin, C C L, Wang, Y R, Shao Wei Wang, Tsuo Wen Lu, Chan, M, Chan Lon Yang, Wu, J Y

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