Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride by Raptakis, Adam, Gounaridis, Lefteris, Epping, Jörn P., Tran, Thi Lan Anh, Aukes, Thomas, Kleinert, Moritz, Weigel, Madeleine, Wolfer, Marco, Draebenstedt, Alexander, Tsokos, Christos, Groumas, Panos, Andrianopoulos, Efstathios, Lyras, Nikos, Nikolaidis, Dimitrios, Mylonas, Elias, Baxevanakis, Nikolaos, Pessina, Roberto, Schreuder, Erik, Dekkers, Matthijn, Seyfried, Volker, Keil, Norbert, Heideman, René G., Avramopoulos, Hercules, Kouloumentas, Christos

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