Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications by Marxer, C., Thio, C., Gretillat, M.-A., de Rooij, N.F., Battig, R., Anthamatten, O., Valk, B., Vogel, P.

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Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids by Luginbuhl, P., Collins, S.D., Racine, G.-A., Gretillat, M.-A., De Rooij, N.F., Brooks, K.G., Setter, N.

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Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation by Gretillat, F., Gretillat, M.-A., de Rooij, N.F.

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Micromechanical relay with electrostatic actuation and metallic contacts by Grétillat, M-A, Grétillat, F, Rooij, N F de

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Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems by Clerc, P-A, Dellmann, L, Grétillat, F, Grétillat, M-A, Indermühle, P-F, Jeanneret, S, Luginbuhl, Ph, Marxer, C, Pfeffer, T L, Racine, G-A, Roth, S, Staufer, U, Stebler, C, Thiébaud, P, Rooij, N F de

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A numerical simulation on a pneumatic air table realized by micro-EDM by Hirata, T., Guenat, O.T., Akashi, T., Gretillat, M.-A., de Rooij, N.F.

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Reflective duplexer based on silicon micromechanics for fiber-optic communication by Marxer, C., Gretillat, M.-A., de Rooij, N.F., Battig, R., Anthamatten, O., Valk, B., Vogel, P.

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Integrated circuit compatible electrostatic polysilicon microrelays by Gretillat, M -A, Thiebaud, P, Linder, C, Rooij, N F de

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A pneumatic air table realized by micro-EDM by Guenat, O.T., Hirata, T., Akashi, T., Gretillat, M.-A., de Rooij, N.F.

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Thermal optimization of micro-hotplates that have a silicon island by Briand, Danick, Heimgartner, Stephan, Grétillat, Marc-Alexis, Schoot, Bart van der, Rooij, Nicolaas F de

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Surface micromachining by Linder, C, Paratte, L, Gretillat, M -A, Jaecklin, V P, Rooij, N F de

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Surface-micromachined Ta-Si-N beams for use in micromechanics by Grétillat, M-A, Linder, C, Dommann, A, Staufert, G, Rooij, N F de, Nicolet, M-A

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Ultrasonic flexural Lamb-wave actuators based on PZT thin film by Luginbuhl, Ph, Collins, S.D., Racine, G.-A., Grétillat, M.-A., de Rooij, N.F., Brooks, K.G., Setter, N.

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Femtoliter injector for DNA mass spectrometry by Luginbuhl, Ph, Indermuhle, P.-F, Grétillat, M.-A, Willemin, F, de Rooij, N.F, Gerber, D, Gervasio, G, Vuilleumier, J.-L, Twerenbold, D, Düggelin, M, Mathys, D, Guggenheim, R

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A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outlets by Grétillat, M.-A, Paoletti, F, Thiébaud, P, Roth, S, Koudelka-Hep, M, de Rooij, N.F

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Integrated shielding lines on multilayer polysilicon resonators by Grétillat, M.-A., Linder, C., de Rooij, N.F.

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Megahertz opto-mechanical modulator by Marxer, C., Grétillat, M.A., Jaecklin, V.P., Baettig, R., Anthamatten, O., Vogel, P., de Rooij, N.F.

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Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component by Marxer, C., Gre´tillat, M.-A., de Rooij, N.F., Ba¨ttig, R., Anthamatten, O., Valk, B., Vogel, P.

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Electrostatic polysilicon microrelays integrated with MOSFETs by Gretillat, M.-A., Thiebaud, P., de Rooij, N.F., Linder, C.

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Electrostatically actuated gas microvalve based on a Ta-Si-N membrane by Dubois, Ph, Guldimann, B., Gretillat, M.-A., de Rooij, N.F.

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