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Corrosion behavior of stainless steel and aluminum in a downstream environment of CF4/O2 microwave plasma
by
HARA, Nobuyoshi
,
MUKUHARA, Shingo
,
OHTOMO, Katsuhisa
,
SHIMIZU, Yasufumi
,
SUGIMOTO, Katsuhisa
Published in
Journal of the Electrochemical Society
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Corrosion Behavior of Stainless Steel and Aluminum in a Downstream Environment of CF[sub 4]/O[sub 2] Microwave Plasma
by
Hara, Nobuyoshi
,
Mukuhara, Shingo
,
Ohtomo, Katsuhisa
,
Shimizu, Yasufumi
,
Sugimoto, Katsuhisa
Published in
Journal of the Electrochemical Society
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Journal Of The Electrochemical Society
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Subjects
Aluminium
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1
Applied Sciences
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Chrom
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Corrosion
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Corrosion Mechanisms
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Dünnschicht
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Eisen
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Exact Sciences And Technology
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Fluorid
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Gasplasma
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Korrosion
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Korrosionsgeschwindigkeit
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Metallorganische Gasphasenabscheidung
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Metals. Metallurgy
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Molybdän
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Nickel
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Oxid
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Rostfreier Stahl
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Sauerstoff
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Tetrafluoromethan
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Institute Of Physics Iopscience Extra
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