Search Results - Ma, Shiau-Yi

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    Lithography-patterning-fidelity-aware electron-optical system design optimization

    Lithography-patterning-fidelity-aware electron-optical system design optimization by Chen, Sheng-Yung, Ng, Hoi-Tou, Ma, Shiau-Yi, Chen, Hsing-Hong, Liu, Chun-Hung, Tsai, Kuen-Yu

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