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Filling behavior of UV nanoimprint resin observed by using a midair structure mold
by
Taniguchi, Jun
,
Machinaga, Ken-ichi
,
Unno, Noriyuki
,
Sakai, Nobuji
Published in
Microelectronic engineering
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Evaluation of filling behavior on UV nanoimprint lithography using release coating
by
Osari, Kazutomo
,
Unno, Noriyuki
,
Taniguchi, Jun
,
Machinaga, Ken-ichi
,
Ohsaki, Takeshi
,
Sakai, Nobuji
Published in
Microelectronic engineering
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Filling Behavior Observation on UV Nanoimprint Lithography
by
Unno, Noriyuki
,
Osari, Kazutomo
,
Machinaga, Ken-ichi
,
Taniguchi, Jun
,
Ohsaki, Takeshi
,
Sakai, Nobuji
Published in
Journal of Photopolymer Science and Technology
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