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A selected-area CVD method for deposition of sensing films on monolithically integrated gas detectors
by
Sanjeev Majoo
,
Schwank, J.W.
,
Gland, J.L.
,
Wise, K.D.
Published in
IEEE electron device letters
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A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD
by
Majoo, Sanjeev
,
Gland, J.L.
,
Wise, K.D.
,
Schwank, J.W.
Published in
Sensors and actuators. B, Chemical
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Fabrication of conductometric gas-sensing films by selected area chemical-vapor deposition
by
Majoo, Sanjeev
,
Schwank, Johannes W.
,
Gland, John L.
Published in
AIChE journal
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