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A Soft-Landing Waveform for Actuation of a Single-Pole Single-Throw Ohmic RF MEMS Switch
by
Czaplewski, D.A.
,
Dyck, C.W.
,
Sumali, H.
,
Massad, J.E.
,
Kuppers, J.D.
,
Reines, I.
,
Cowan, W.D.
,
Tigges, C.P.
Published in
Journal of microelectromechanical systems
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Thermomechanical modeling of back-end-of-the-line 3D interconnects
by
Massad, J.E.
,
Bauer, T.M.
,
Shinde, S.L.
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Front end of line integration of high density, electrically isolated, metallized through silicon vias
by
Bauer, T.M.
,
Shinde, S.L.
,
Massad, J.E.
,
Hetherington, D.L.
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Modeling, simulation, and testing of the mechanical dynamics of an RF MEMS switch
by
Massad, J.E.
,
Sumali, H.
,
Epp, D.S.
,
Dyck, C.W.
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