Search Results - Mata-Salazar, J

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    Thickness measurement of nm HfO2 films

    Thickness measurement of nm HfO2 films by Kim, K J, Kim, A, Kim, C S, Song, S W, Ruh, H, Unger, W E S, Radnik, J, Mata-Salazar, J, Juarez-Garcia, J M, Cortazar-Martinez, O, Herrera-Gomez, A, Hansen, P E, Madesen, J S, Senna, C A, Archanjo, B S, Damasceno, J C, Achete, C A, Wang, H, Wang, M, Windover, D, Steel, E, Kurokawa, A, Fujimoto, T, Azuma, Y, Terauchi, S, Zhang, L, Jordaan, W A, Spencer, S J, Shard, A G, Koenders, L, Krumrey, M, Busch, I, Jeynes, C

    Published in Metrologia
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    Thickness measurement of nm HfO 2 films

    Thickness measurement of nm HfO 2 films by Kim, K J, Kim, A, Kim, C S, Song, S W, Ruh, H, Unger, W E S, Radnik, J, Mata-Salazar, J, Juarez-Garcia, J M, Cortazar-Martinez, O, Herrera-Gomez, A, Hansen, P E, Madesen, J S, Senna, C A, Archanjo, B S, Damasceno, J C, Achete, C A, Wang, H, Wang, M, Windover, D, Steel, E, Kurokawa, A, Fujimoto, T, Azuma, Y, Terauchi, S, Zhang, L, Jordaan, W A, Spencer, S J, Shard, A G, Koenders, L, Krumrey, M, Busch, I, Jeynes, C

    Published in Metrologia
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