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Fluid Model of an Electron Cyclotron Wave Resonance Discharge
by
Sfikas, S.A.
,
Amanatides, E.K.
,
Mataras, D.S.
,
Rapakoulias, D.E.
Published in
IEEE transactions on plasma science
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Ieee Transactions On Plasma Science
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Argon
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Boundary Conditions
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Computational Fluid Dynamics
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Computer Simulation
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Cyclotron Resonance
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Cyclotrons
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Discharge
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Electron Cyclotron Wave Resonance
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Electrons
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Inductively Coupled Plasma
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