Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device by Lalinský, T., Hudek, P., Vanko, G., Dzuba, J., Kutiš, V., Srnánek, R., Choleva, P., Vallo, M., Držík, M., Matay, L., Kostič, I.

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Fabrication process development for a high sensitive electrochemical IDA sensor by Partel, S., Mayer, M., Hudek, P., Dinçer, C., Kieninger, J., Urban, G.A., Motzek, K., Matay, L.

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GaAs based micromachined thermal converter for gas sensors by Lalinský, T., Držík, M., Jakovenko, J., Vanko, G., Mozolová, Ž., Haščík, Š., Chlpík, J., Hotový, I., Řeháček, V., Kostič, I., Matay, L., Husák, M.

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Properties of nano-scaled disperse media investigated by refractometric measurements by Sarov, Y., Capek, I., Janíc˘ková, S., Kostic˘, I., Konec˘níková, A., Matay, L., Sarova, V.

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Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask by Dreeskornfeld, L., Haindl, G., Kleineberg, U., Heinzmann, U., Shi, F., Volland, B., Rangelow, I.W., Majkova, E., Luby, S., Kostic, Matay, L., Hrkut, P., Hudek, P., Lee, Hsin-Yi

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Advanced patterning techniques for nanodevice fabrication by KOSTIC, I, ANDOK, R, BARAK, V, CAPLOVIC, I, KONECNIKOVA, A, MATAY, L, HRKUT, P, RITOMSKY, A

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Studies of dielectric characteristics of spin-coated polyimide films by Matay, L.

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T-shaped gates for heterostructure field effect transistors by Lalinský, T., Škriniarová, J., Kostič, I., Hart van der, A., Hrkút, P., Haščı&#x0301, k, Š., Matay, L., Mozolová, Ž., Kordoš, P.

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Assembling of nanoparticle arrays using microelectromagnetic matrix by Chitu, L., Luby, S., Majkova, E., Hrkut, P., Matay, L., Kostic, I., Satka, A.

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Mechanically fixed and thermally insulated micromechanical structures for GaAs heterostructure based MEMS devices by Lalinsky´, T, Haš ík, S, Mozolová, ., Burian, E, Krná, M, Tomáška, M, Škriniarová, J, Drz ík, M, Kostic, I, Matay, L

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Material optimization of the alignment marks for the EBDW lithography by Matay, L, Andok, R, Barák, V, Ritomský, A, Konečniková, A, Kostič, I, Partel, S, Hudek, P

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Patterning of nanometer structures by using direct-write e-beam lithography for the sensor development by Ďurina, P, Štefečka, M, Roch, T, Noskovič, J, Trgala, M, Pidík, A, Kostič, I, Konečniková, A, Matay, L, Kúš, P, Plecenik, P

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The influence of patterned substrates on structure and magnetism of Au/Co multilayers by Angelakeris, M., Papaioannou, E.Th, Valassiades, O., Vouroutzis, N., Tsiaoussis, I., Mueller, Ch, Fumagalli, P., Kostic, I., Matay, L., Flevaris, N.K.

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RIE of the polyimide micromechanical structures by Matay, L., Kostic, I., Hrkut, P., Andok, R.

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T-shaped gate based on poly Si/polyimide supported layers by Lalinsky, T., Hrkut, P., Matay, L., Kostic, I., Hascik, S., Hudek, P.

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Estimation of exposure parameters of chosen e-beam resists using variable shaped e-beam pattern generator by Andok, R., Matay, L., Kostic, I., Bencurova, A., Nemec, P., Konecnikova, A., Ritomsky, A.

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New progressive method suitable for the exposure optimization of large and complex defect-free chips direct written by ZBA 21 e-beam tool by Matay, L., Andok, R., Barak, V., Konecnikova, A., Kostic, I., Partel, S., Hudek, P.

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MICROMECHANICAL THERMAL CONVERTER DEVICE BASED ON POLYIMIDE-FIXED ISLAND STRUCTURE by LALINSKÝ, T., KRNÁČ, M., HAŠČÍK, Š., MOZOLOVÁ, Ž., MATAY, L., KOSTIČ, I., HRKÚT, P., JAKOVENKO, J., HUSÁK, M.

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