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Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork
by
Ohtsuka, Takahiro
,
Inoue, Takahiro
,
Yoshimatsu, Masahiro
,
Matsudo, Hideryo
,
Uehara, Hiroshi
,
Okazaki, Masanobu
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Japanese Journal of Applied Physics
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Development of an Ultra-Small Angular Rate Sensor Element with a Laminated Quartz Tuning Fork
by
Ohtsuka, T.
,
Inoue, T.
,
Yoshimatsu, M.
,
Matsudo, H.
,
Okazaki, M.
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Quartz crystal element for angular rate sensor
by
Matsudo, H.
,
Ishihara, M.
,
Kawasaki, S.
,
Yukawa, J.
,
Hatanaka, M.
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