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Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography
by
Lu, Haoyan
,
Odstrčil, Michal
,
Pooley, Charles
,
Biller, Jan
,
Mebonia, Mikheil
,
He, Guanze
,
Praeger, Matthew
,
Juschkin, Larissa
,
Frey, Jeremy
,
Brocklesby, William
Published in
Ultramicroscopy
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Ultramicroscopy
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Euv
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Hhg
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Microscopy
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Multilayer Mirror
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Ptychography
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