Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation by Choi, B.K., Fleetwood, D.M., Schrimpf, R.D., Massengill, L.W., Galloway, K.F., Shaneyfelt, M.R., Meisenfieimer, T.L., Dodd, P.E., Schwank, J.R., Lee, Y.M., John, R.S., Lucovsky, G.

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